This error is common if the Exchange Servers use Antivirus endpoint software or a backup agent. The antivirus software or backup agent will impact the stopping services process.
It’s easy to fix it.
1. Disable antivirus endpoint (Sophos or others) and Backup agent.
2. Run the below command again.
.\Setup.exe /IAcceptExchangeServerLicenseTerms_DiagnosticDataON /Mode:Upgrade
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